JPH0390675U - - Google Patents
Info
- Publication number
- JPH0390675U JPH0390675U JP15085889U JP15085889U JPH0390675U JP H0390675 U JPH0390675 U JP H0390675U JP 15085889 U JP15085889 U JP 15085889U JP 15085889 U JP15085889 U JP 15085889U JP H0390675 U JPH0390675 U JP H0390675U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- forming
- air flow
- spin coating
- coating apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 9
- 238000004528 spin coating Methods 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15085889U JPH0390675U (en]) | 1989-12-30 | 1989-12-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15085889U JPH0390675U (en]) | 1989-12-30 | 1989-12-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0390675U true JPH0390675U (en]) | 1991-09-17 |
Family
ID=31697190
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15085889U Pending JPH0390675U (en]) | 1989-12-30 | 1989-12-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0390675U (en]) |
-
1989
- 1989-12-30 JP JP15085889U patent/JPH0390675U/ja active Pending
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